Electron probe type

A field emission gun in which a field emission tip for generating charged particles is axially aligned with apertures in an intermediate electrode and a main electrode. A field electrode is placed in juxtaposition to the field emission tip for developing a particle generation field. This electrode is...     

A field emission gun in which a field emission tip for generating charged particles is axially aligned with apertures in an intermediate electrode and a main electrode. A field electrode is placed in juxtaposition to the field emission tip for developing a particle generation field. This electrode is...     

An apparatus for releasably and adjustably mounting a specimen in an electron microscope. A specimen-holding unit is releasably and fluidtightly mounted in an evacuatable chamber and abutting the lens of the electron microscope in the mounted position. The unit is held in place by the pressure differential...     

An electron scanning apparatus is capable of two-dimensional scanning of a specimen with a primary electron beam and also capable of radiating the primary electron beam in spot on the specimen. While moving the specimen in a straight line, the two-dimensional scanning with the primary electron beam is...     

In a field emission charged particle microscope having a housing defining a vacuum chamber, a field emission tip disposed in the chamber for generating charged particles, electrode means for establishing electrostatic focusing and accelerating field for forming a beam of charged particles, field electrode...     

An electron beam from an electron column instrument impinges on a target foil to produce a primary X-ray beam which, in turn, passes through a collimator to impinge on a specimen. The X-rays fluoresced from the specimen by the primary X-ray beam are detected by a solid state radiation detection device.

A scanning electron microprobe and display system adaptable to stereoscoptic or side-by-side viewing of an image for comparison on a television type monitor. The apparatus includes means for scanning the microprobe beam in a raster over a specimen and displaying the image on the cathode ray tube viewer....     

A scanning electron device having means for creating an electric field for directing secondary electrons to a detecting means comprising auxiliary electrodes and power supplies therefor so as to increase both the output signal intensity and contrast obtained by the electron detector. The field is created...     

A scanning electron microscope or other type of scanning electron device incorporating a light pen for automatically changing the field of view of a specimen on a CRT. The output of said light pen controls the center and/or width of the scanning area of the incident electron beam irradiating the specimen...     

Apparatus capable of tridimensionally measuring the distance between two arbitrary points on the surface of a sample is disclosed. In apparatus wherein the surface of the sample to be observed is scanned with an energized beam, wherein a secondary radiation emitted from the sample is detected and wherein...     

A high-speed circuit for causing the corpuscular particle beam of a corpuscular particle microprobe such as a scanning electron microscope to be periodically and sequentially displaced from its normal path so as to, in effect, interrupt the beam's bombardment of a specimen during certain of the scanning...     

A scanning electron microscope having a plurality of annular shaped electron detectors. The ratio of two detector output signals is compared with some constant value indicative of a component of the specimen. On the basis of the comparison the output signal of one detector is passed or not passed to...     

A scanning electron microscope for displaying a scanning image on a cathode ray tube screen. A high magnification image is displayed within a low magnification image displayed on a cathode ray tube screen so that the relative positions of the low and high magnification images can be immediately observed....     

An improved, thin layer, metallic diaphragm structure for electron microscopes is disclosed having a very thin sheet member, approximately 0.5 to 1 micron thick, surrounding the aperture which is attached to and supported by a reinforcing member approximately 30 microns thick, set away from the aperture....     

An electrostatic charged-particle analyzer includes a deflecting electrode system which focuses charged particles emitted from a sample by irradiating the sample with a primary beam, the particles being focused on the axis of the primary beam or on an identical circumference about the axis, and a cylindrical...     

A method of performing Auger electron spectroscopic surface analysis, e.g. of silicon, in which the secondary electrons which leave the target material are analyzed without the use of an electron optic device. An a.c. signal modulated retard potential is applied in ramp form to the target and a detection...     

A charged-particle beam correction arrangement for a charged-particle analyzer having deflecting electrodes which focus charged particles emitted from a sample onto a center axis, an extension thereof, or onto an identical circumference with its center on the axis, a slit which is disposed at the focus...     

An apparatus for irradiating a flowing material with an electron beam includes an electron beam accelerating device having an electron beam emitter; an irradiation device having an inclined irradiation tray arranged underneath the electron beam emitter and determining a flowpath for the material to be...     

A beam analyzing system using a point scattering detector in conjunction with the standard secondary electron collector and imaging system of a scanning electron microscope. The detector consists of a sharp metal (preferably tungsten) tip located centrally in a biased aperture assembly mounted in the...     

An apparatus for electron beam lithography for automatically focusing a shaped electron beam uniformly projects an electron beam onto a reference aperture plate having an opening of a prescribed shape. The electron beam in the shape of the opening of the aperture thus obtained is reduced or concentrated...     

An instrument utilizing the Auger effect and including a cylindrical mirror analyzer with magnetic lenses and an off-axis annular-aperture collector apparatus arranged in a unique configuration.

An electron microscope backscattered detector comprising an arm of scintillation material with a hole through which the electron beam passes, the hole being provided with a removable grounded liner to facilitate cleaning and prevent astigmatism problems due to electron build up.

A charged-particle energy analyzer having means for irradiating a sample with a primary electron beam, deflecting electrode means which focus charged particle flux emitted from the sample onto a center axis of the primary electron beam or onto an identical circumference with its center on the axis, a...     

In a scanning electron microscope, an objective lens field is generated between a pair of deflecting coils and a specimen by an objective lens having upper and lower magnetic pole pieces. A supplemental magnetic pole piece is installed between said upper and lower magnetic pole pieces so that the half...     

A sample is bidimensionally scanned with an electron beam to display an image of the sample based on a secondary-electron signal generated from the sample. Two marks corresponding to two points on the sample are displayed in superposition to the image and a distance between the two points on the sample...     

An ion-electron analyzer consists of an ion microprobe analyzer and an electron diffractometer which are accommodated in a single housing, an ion gun extracts an electron beam and a negative ion beam simultaneously from the same source of charged particles and simultaneously bombards these beams onto...     

Two marks of variable positions are displayed in superposition on the image of a specimen. The distance between two points on the specimen corresponding respectively to the marks is calculated on the basis of the magnification of the image of the specimen. The distance thus calculated is multiplied by...     

A series of LED elements is included in a scanning electron microscope in order to indicate the brightness and the contrast of a video signal to be recorded. The brightness is indicated by the position of an illuminating LED element, and the contrast is indicated by the number of alternately illuminating...     

A scanning electron microscope with an electron optical column and a sample chamber for a test sample disposed therein in a vacuum, in which the sample holder forms, directly or indirectly, an hermetic seal for the sample chamber. The electron-optical column is preferably suspended underneath the sample...     

An element for the retarding field analysis of the energy distribution of electrons is constructed from three or more similar planar grids superimposed in parallel planes. The element is arranged for rigid location with respect to the beam axis of a scanning electron microscope so that the beam passes...     

Charged-particle spectroscopy apparatus for the chemical analysis of a sample in which an apertured plate receives charged particles emitted from the sample and transmits them to an analyzer for analyzing the energies of the particles, the aperture of the plate being such as to restrict the particles...     

An electrostatic emission lens arrangement for producing a microparticle ge of a surface by means of charged particles emitted from such surface and accelerated to a predetermined final energy level. Such arrangement includes two apertured diaphragms arranged in spaced relationship to each other and...     

An X-ray spectrometer which is arranged inside an evacuatable housing and which comprises a wavelength dependent X-ray detection system and, for irradiating the specimen to be examined, an electron source with an electron deflection system for generating an electron beam and an X-ray source for generating...     

The invention relates to a device for contact free potential measurements of integrated circuits by means of measuring the energy of the secondary electrons released at the measuring location. One collector electrode 16 and one opposing field electrode 18 are arranged in succession at a predetermined...     

The radiant heat of the graphite carrier of a LaB.sub.6 cathode is utilized o heat the input diaphragm of the monochromator of an electron spectrometer by opening up the aperture in the repeller electrode that provides magnetic shielding from the heating current and through which the emitting portion...     

1. Apparatus for the interception of an artificial earth orbiting satellite and the detection of thermonuclear material therein comprising, an interceptor vehicle having means for establishing and maintaining a given attitude in space with respect to said satellite, high-energy electron beam generating...     

A scanning electron microscope, comprises an electron gun, an electron-optical column which comprises an anode for accelerating the electrons, a specimen holder for accommodating and positioning the specimen to be examined being arranged underneath said column, and also a detector for detecting the electrons...     

An X-ray detector of semiconductor type in which reflected electrons emitted from a sample are diverted to another direction by the action of a magnetic field provided across a passage for X-rays from a sample to an X-ray detecting element of semiconductor type, and an absorbent for absorbing reflected...     

A specimen image display apparatus is disclosed in which a specimen signal generated when the surface of a specimen is radiated while being scanned by an electron beam is detected, and this detection signal is used to display a magnified image of the specimen on a cathode ray tube. In addition to the...     

In electron beam lithography apparatus a substrate, on which an exposure pattern is to be produced, is exposed to a plurality of electron beams. In a double beam arrangement one beam is capable of the highest resolution required and has a necessarily low writing speed. The other beam is relatively coarse...     

An electron microscope of scanning type comprises first and second detectors for detecting secondary electrons emitted from a specimen irradiated by a scanning electron beam are disposed across the magnetic field of an objective lens of an electron-optical system of the microscope. The detection signals...     

An upper deflection coil comprising a toroidal coil. A lower deflection coil comprising a saddle-shaped coil to minimize the combined inductance of the upper and lower deflection coils. A single scanning signal generator which supplies the deflection coils with scanning signals having different frequencies,...     

A detection system of an electron microscope comprises a number of detection elements which are arranged on ends of flexible optical conductor bundles which face a specimen. The other ends of the optical conductor bundles are optically coupled to a light passage block which is made of a clear material...     

A charged particle beam scanning device is provided with two coordinates conversion circuits. For rotating the scanning direction of the charged particle beam, one of the coordinates conversion circuit is connected between a scanning signal generator and a magnification circuit, the output of which is...     

An exterior view examination apparatus comprising a movable sample stage provided in a sample chamber of a scanning type electron microscope; a sample mounted on the stage; and an optical microscope which can observe the sample from an exterior of the chamber, mounted on the chamber in parallel with...     

Macroanalyzer system comprising in combination: a crystal for separating X-ray emitted from a sample, an X-ray detector for detecting X-ray which are separated by the crystal, and a solar slit member located between the crystal, sample and X-ray detector. An operation circuit receives the output of said...     

An automatic focussing arrangement for use with scanning electron beam apparatus such as a scanning electron microscope or electron beam microfabrication apparatus sets the focus coil (18) current at each one of a plurality of predetermined values in turn. At each setting, the scanning system (10, 12,...     

A synchronizing signal from a tester which also supplies a test signal to an object to be measured is supplied to a programmable counter. An output from the programmable counter is supplied to a D/A converter which then produces an X-axis scanning control signal S.sub.X. The output from the programmable...     

A charged particle energy analyzer comprises a source for generating radiation to be incident on a sample so as to emit charged particles from the sample, a low energy pass reflection filter for selectively reflecting the charged particles having energy lower than a first value, a high energy pass transmission...     

A converging lens system of the electron beam scanning device incorporates a condenser lens (or lenses), an objective lens and an aperture means being capable of changing the aperture diameter so as to produce an electron beam spot on a specimen and vary the electron beam current on the specimen. The...     

A potential analyzer, suitable for use in measuring the potential of a specimen such as LSI by means of an electron beam probe, comprises a detector for detecting secondary electrons emitted from the specimen irradiated with a primary electron beam, a grid electrode disposed between the detector and...     

A method for examining non-metallized semiconductor wafers without the use of any electrical or mechanical contact therewith is provided by the scanning of the wafer with an electron beam. The bombardment of the wafer with the electrons generates charges which are retained in the semiconductor material...     

A vacuum furnace for the ionic surface treatment of workpieces in which the workpiece is connected as one of a pair of electrodes of opposite polarity, and in which a third electrode is located adjacent the workpiece and is connected to it at the same polarity and potential so as to be subject to the...     

In a field emission scanning type electron microscope which varies widely a primary electron beam acceleration voltage, a width of the primary electron beam is thinly focused by a large acceleration voltage when the beam passes through the focusing lens. The AC variation caused due to the gases near...     

In order to find criteria for the adjustment of an optimum focus, lens correction, specimen shift and the like, measurements are performed by means of a beam wobbler and the corresponding generation of a variable F(s)=.THETA..vertline.(Xi-Yi+s).vertline.* in order to determine that s-value for which...     

A potential analyzer for analyzing a potential at a specimen such as an LSI device or the like. This analyzer comprises: a detector to detect secondary electrons to be emitted from a specimen by radiating a primary electron beam thereto; a retarding grid, provided between the specimen and the detector,...     

An electron microscope having plural stages of focusing lenses between an objective lens and an electron gun. The magnetic pole piece of the focusing lens of the final stage which is on the side of the objective lens takes a conic form which tapers toward the objective lens. The yoke of the objective...     

An installation for electron beam metalworking comprises an electron gun (1), a transformer and rectifier system producing a rectified high voltage supplied to the gun, a vacuum tube (23) disposed in the circuit and associated with means (21) sensitive to the current flowing through the circuit and adapted...     

The present invention relates to an apparatus for detecting the secondary electrons which are obtained from a sample (4) when the sample is irradiated with an electron beam (2). When this electron beam (2) is subjected to a low acceleration voltage, it is desirable to detect the secondary electrons efficiently...     

Electron detector apparatus and method for detecting secondary electrons released from a body, of particular utility in testing integrated circuits in an operational state. The apparatus utilizes a magnetic lens having an axis of symmetry, for producing a magnetic field that progressively weakens along...     

The present invention relates to a scanning electron mircoscope suitable for observing the magnetization condition of the portion of a magnetic material which is in the vicinity of the surface thereof. This microscope consists of means for emitting a fine electron beam to the upper surface of a sample,...     

A charged particle beam microprobe apparatus capable of accurately determining the three-dimensional structure of a surface is disclosed in which a detection system including at least a pair of detectors disposed symmetrically with respect to the optical axis of an charged particle beam generating instrument...     

A detector for charged particles, i.e. secondary electons ir ions emitted from a bombardment area of a specimen in an instrument such as a scanning electron microscope or analytical instrument, consists of a collector, e.g. a scintillation surface highly charged with a voltage of the opposite polarity...     

Herein disclosed is a scanning electron microscope in which an electron beam is finely focused into a small beam diameter and irradiated on a specimen so that the focused electron beam may scan two-dimensionally to obtain an image with signals of secondary electrons generated from the specimen. The scanning...     

An Auger electron microscope is equipped with a field-emission tip maintained at an essentially constant distance above the surface of the specimen. The tip may consist of a tungsten (100) whisker having a radius of .about.50 nm at the apex, the working distance being on the order of 1 mm. Auger electrons...     

A detector for back-scattered electrons includes a scintillator crystal and a light-conducting device for directing away the secondary radiation to a receiver. The light-conducting device is placed against the scintillator crystal in such a way that the secondary radiation is directed away symmetrically...     

There is disclosed a scanning particle microscope in which the adverse influence of the Boersch effect is reduced. This is achieved by providing an elastrostatic retardation element in the particle optics unit to decelerate the particle from a first energy, at which the particles are generated, to a...     

A sample surface structure measuring method using a scanning type electron microscope featured by scanning the sample surface by an electron beam incident from above the sample surface; measuring the amount of the secondary electrons discharged according to the three-dimensional structure of the sample...     

An electron microscope is provided in which in order to monitor operating waveforms within the element of a semiconductor integrated circuit, an electron beam is bombarded from an electron gun to the measuring point of a specimen to be measured, the resultant secondary electron emitted from the specimen...     

A hybrid charged particle apparatus includes a charged particle source which is made up of a field-emission electron source for emitting an electron beam, a liquid-metal ion source for emitting an ion beam, and changeover means for replacing one of the electron and ion sources by the other at a predetermined...     

An electron beam metrology system for measuring the width of a pattern on a surface of a sample in such a manner that the surface of the sample is scanned with an electron beam, secondary electrons emitted from the surface are detected to obtain a detection signal, and the width of the pattern is measured...     

Method of determining stereoscopic geometry of an object through photometric stereoscopic measurement with high accuracy. Three or more images of the object picked up in a same fixed direction by varying the state of light sources are derived. Relationships among the images are corrected so that an evaluation...     

A strobo electron beam apparatus is provided having an energy analyzer, which: measures the voltage in the integrated circuit; samples a secondary electron signal by setting and connecting a retarding voltage of the energy analyzer to the measured phase; obtains the waveform of the secondary electron...     

In an electron spectrometer, electrons emanating from a source are collected and focused to a collimated stream by an electrostatic lens free of spherical aberration. The lens includes a pair of axially spaced concave grids approximating sections of concentric ellipsoids having a common focii and coaxial...     

A high time resolution electron microscope unit comprising a beam source for generating an exciting beam; a microscope for exposing the surface of a specimen to be observed to the exciting beam for emitting electrons from the surface; an image formation device for receiving the emitted electrons and...     

An electron beam tester for fault detection and isolation in large and very large scale integrated circuits. An electron optical column focuses a primary beam of electrons on the surface of a circuit chip. An immersion extractor provides an electrical field to attract secondary electrons emitted from...     

Disclosed is an electron beam metrology system for measuring the width of a pattern on a specimen by scanning the specimen with a deflected electron beam, detecting a pattern image signal provided by secondary electrons emitted from the specimen, and measuring the pattern width on the specimen on the...     

A stroboscopic type potential measurement device is disclosed, in which a waveform of a periodically varying voltage at a location irradiated with a charged particle pulsed beam is measured by using the charged particle pulsed beam synchronized with a periodically varying voltage in a sample and varying...     

An electric beam integrated circuit tester including a source of primary electrons, a support for the integrated circuit, and an electronic column fixed above the support for the integrated circuit for focusing the primary electron beam emitted at the surface of the circuit on the points of the circuit...     

A retarding field spectrometer has a mounting ring for attachment to the pole piece of a scanning electron microscope or similar beam generator. Supported by the mounting ring are three screen electrodes with their planes positioned normal to the beam axis and adjustable as a unit in a pseudo-orthogonal...     

A specimen distance measuring system uses a plate (36) to obstruct the flux of backscattered electrons produced by an electron beam (18), and to cast a shadow across a measurement detector (32) which is sensitive to the position of the shadow. The shadow plate (36) and measurement detector (32) are aligned...     

A scanning electron microscope includes a heater coil which is arranged around a sample, an electron beam which is radiated when the sample is heated, and a secondary electron generated from the sample which is attracted to a photo multiplier. In this electron microscope, a shield plate is provided having...     

A charged particle collector assembly, particularly for use with an electron beam gun, is described. The assembly comprises a reflection member onto which electrons impinge in use, the reflection member being adapted substantially to absorb particles of one polarity and substantially to reflect particles...     

A scanning electron microscope for scanning the surface of a specimen with an electron beam to detect secondary electrons, backscattered electrons, or X-rays emitted from the specimen, thereby forming an image of the surface of the specimen, is provided with a specimen table capable of making a horizontal...     

A magnetic lens system is provided for a beam of charged particles, comprising a pair of ring-shaped permanent magnets through which the beam passes, the axes of the rings lying coaxially along the beam direction, and the two rings being axially separated and axially oppositely magnetised. A pair of...     

A direct-imaging, monochromatic electron microscope includes an objective lens for collecting a substantial portion of emitted electrons from an area across a sample surface, a first transfer lens for collimating the electrons into beams, an energy filter receptive of the beams to transit monochromatic...     

There is disclosed an electron microscope comprising a stage assembly for tilting, translating, or rotating the specimen, a first and a second detector disposed on opposite sides of the optical axis of the beam to detect secondary electrons produced in response to the incidence of the beam. The first...     

An electron beam apparatus in which the electron beam is directed to a sample and secondary electrons from the sample return in the direction of the beam and are deflected sideways to a collector by a first electrostatic deflection means. To compensate for distortion of the spot produced by the beam...     

An apparatus using a charged particle beam is disclosed which includes means for generating charged particles, means for accelerating the charged particles so that the charged particles have desired kinetic energy, lens means including at least one objective lens for focusing a charged particle beam...     

An apparatus adapted for the analysis of a surface of a sample and comprising: means for stimulating a region of said surface to emit charged particles; means for moving a light reflecting means in a substantially rectilinear fashion along an optical axis of a microscope to a position where it reflects...     

A detector for charged particles includes three grid electrodes arranged approximately parallel to the surface of a specimen and separated from one another by insulating spacers, as well as a charged particle sensitive part nearly completely covering the specimen. The particle sensitive part includes...     

A measurement processing arrangement for processing of signal curves of periodic high frequency measured signals through parallel measurement processing units include n number of preceding gate circuits which periodically process n number of chronologically offset measured signals and form n averages...     

Apparatus for producing a pulsed electron beam, particularly adapted for inspecting integrated circuits, includes a beam scanner (10) for causing a continuous electron beam to scan a circle, which beam may emerge from the second of three electrostatic lenses of an electron beam microscope. The beam then...     

A thermally compensated tube scanner scanning tunneling microscope utilizes two concentric piezoelectric tubes, one for scanning and one for coarse translation as well as fine adjustment of sample position while in tunneling range. There are no mechanical components such as springs, levers, gears, or...     

Picture electrodes of an LCD semi-manufactured product in which normal addressing is not possible are scanned by means of an electron beam (7) in order to test the associated switching elements (13, 20). In a different type of LCD semi-manufactured product the quality of the switching elements (23, 24)...     

A method and apparatus for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly...     

An x-ray microanalyzer is a useful instrument which obtains an image representing the distribution of the constituent elements of a specimen, by detecting characteristic x-rays produced from a microscopic region on the specimen. The present invention is intended to enhance the efficiency of such an analysis...     

A spray aperture disk designed for insertion into a column liner of an electron microscope having a substantially circular shape, a plurality of tabs or extensions located on the circumferential periphery of the disk and a small central aperture. The disk is inserted into the tapered end of a column...     

Confocal laser scanning microscope comprising a laser as point light source, a deflection system for the line and frame scanning and a lens system, at least one objective near the object, an object stage, a spatial filter and a detector, and an electronic control and imaging-processing system. The object...     

A viewing system destined to be employed in association with a transmission electron microscope, which system comprises a converter for converting an image of a specimen focused by a focusing lens system of the electron microscope into an electric signal, a frame memory for processing the electric signal...