Fluid coupling

6161875
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Inventors

Yamaji, Michio
Shinohara, Tsutomu
Yokoyama, Kosuke

Application #

280014

Filed

Mar-29-1999

Published

Dec-19-2000

Current US Class

285/124.1
285/24
285/26
285/328
285/379
285/906

International Classes

F16L 035/00

Field of Search

285/379 285/24 285/27 285/124.1 285/328 285/906 285/26

Assignee

Fujikin Incorporated (Osaka, JP)

Examiners

Arola; Dave W.

Attorney, Agent or Firm

Armstrong, Westerman, Hattori, McLeland & Naughton

US Patent References

5011196   Union for fluid con...
5482332   Pipe joint
5673946   Gasket assembly fo...
5829796   Protection of sealin...

Referenced by:

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Citation

Cite This Patent

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Abstract
Each of coupling members 5, 12 is formed with a retainer accommodating recessed portion 45, 46 in an butting end face thereof, the recessed portion 45, 46 being formed on a bottom face thereof with a gasket holding annular ridge 47, 48 having an annular projection 47a, 48a. A retainer 42 comprises a retainer body 43 holding the outer periphery of a gasket 41 and attached to the outer periphery of the annular ridge 47 of one of the coupling members, 5, and a guide ring portion 44 for guiding a peripheral surface of the recessed portion 46 of the other coupling member 12 when the two coupling members 5, 12 are butted against each other.
 
Claims
What is claimed is:

1. A fluid coupling comprising:

a first coupling member with a fluid channel further having,

a first retainer accommodating recessed portion in a face for abutting a second coupling member, and

a gasket holding annular ridge in the recessed portion having an annular projection;

the second coupling member with a fluid channel positioned to communicate with the fluid channel in the first fluid coupling member, the second coupling member further having,

a second retainer accommodating recessed portion in a face for abutting the first coupling member,

a gasket holding annular ridge in the recessed portion having an annular projection;



Description
BACKGROUND OF THE INVENTION

The present invention relates to fluid couplings, and more particularly to fluid couplings useful for connecting massflow controllers, on-off valves and connecting blocks interposed between these devices in fluid control apparatus for fabricating semiconductors.

Fluid control apparatus for use in fabricating semiconductors comprise controllers, such as massflow controllers for controlling flow rates and pressure regulators for controlling pressure, and on-off valves, etc. in combination with the controllers. The present applicant has already proposed a desirable arrangement wherein a massflow controller is connected to an on-off valve by a suitable connecting block for use in such control apparatus (see JP-A No. 326943/1996). FIG. 6 shows the construction of a fluid coupling disclosed in the proposal.

With reference to FIG. 6, the fluid coupling comprises male and female coupling members 9, 92 having gasket holding annular projections 98, 99 respectively on butting end faces thereof, an annular gasket 93 interposed between the butting end faces of the two coupling members 91, 92, and a retainer 94 holding the outer periphery of the gasket 93 to retain the gasket 93 on the female coupling member 92. Each of the coupling members 91, 92 may be a connecting block, massflow controller body, or block joined to an on-off valve. One of the butting end faces of these coupling members 91, 92 is of the male type, and the other end face is of the female type. A fitting raised portion 95 formed on the butting end face of the male coupling member 91 and projecting axially thereof is fitted in a fitting recessed portion 96 formed in the butting end face of the female coupling member 92, whereby the coupling members 91, 92 are prevented from being displaced from each other radially thereof. A retainer holding cylindrical portion 97 is formed on the butting end face of the female coupling member 92. The retainer 94 holds the cylindrical portion 97, whereby the gasket 93 is retained on the female coupling member 92.
 
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