High-vacuum coating apparatus

5254169
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Inventors

Wenk, Karl-Heinrich

Application #

914752

Filed

Jul-15-1992

Published

Oct-19-1993

Current US Class

118/718
118/719
118/726
118/730
118/733

International Classes

C23C 014/24; C23C 014/26

Field of Search

118/718 118/719 118/726 118/730 118/733 49/477

Assignee

Leybold Aktiengesellschaft (Hanau, DE)

Examiners

Hearn; Brian E.

Attorney, Agent or Firm

Felfe & Lynch

US Patent References

4380211   Vacuum evaporatio...
4450186   Method and device...
4469335   Sealing apparatus...
4581245   Method of manufac...
4622919   Film forming appa...
4655167   Apparatus for man...
4692233   Vacuum coating a...
4962725   Apparatus for prod...
5076203   Coating apparatus...

Referenced by:

View Backward References

Other References

Wolf, Silicon Processing for the VLSI Era, 1986, pp. 78, 85-87, 89-92. JP 010230775 A (Matsushita) Derwent English abstract, Sep. 1989. JP 600017074 A (Konishiroku) Derwent English abstract, Jan. 1985.

Citation

Cite This Patent

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Abstract
A vacuum tank (1) in which a film is coated under high vacuum is divided by a partition wall (26) into a coating chamber (28) and a winding chamber (27) containing a supply roll (21) and a take-up roll (22). The coating chamber (28) contains an evaporator bank (24). Into the latter a coating cylinder (27) reaches. Diffusion pumps (14, 15) are connected exclusively to the coating chamber (28), so that the high vacuum necessary for the coating need be produced only in this coating chamber (28) and not in the entire vacuum tank (1). An inflatable gasket (32), variable in cross section, seals the partition wall (26) from the vacuum tank wall (1).
 
Claims
What is claimed is:

1. High-vacuum coating apparatus for coating a film comprising: an evacuable vacuum tank, mechanical pumps and at least one diffusion pump for evacuating the vacuum tank, a supply roll for unwinding a film, a take-up roll, a coating cylinder for guiding the film to the take-up roll, an evaporator bank disposed underneath the coating cylinder for the evaporation of the coating material, a partition wall for dividing the vacuum tank into a winding chamber having the supply roll and take-up roll and a coating chamber which contains the evaporator bank and into which at least one area of the coating cylinder, where the coating of the film takes place, extends facing the evaporator bank, the mechanical pumps being disposed for the evacuation of the winding chamber and the coating chamber, and the diffusion pump being connected exclusively to the coating chamber, the apparatus including a floor running unit having the partition wall including a bearing plate and a tank-end plate between which plates the partition wall is fastened, the vacuum tank having a wall and the apparatus including an inflatable tubular gasket, which therefore is variable in cross section, for sealing the partition wall from the wall of the vacuum tank, the tubular gasket having an interior having an atmosphere connection.



Description
The invention relates to a high-vacuum coating apparatus for coating a film which is unwound from a supply roll in a vacuum tank which can be evacuated by mechanical pumps and at least one diffusion pump, and is carried over a coating cylinder to a winding roll, an evaporator bank being disposed underneath the coating cylinder for the evaporation of the coating material.

Coating apparatus of the above kind are used for coating films with a metal overlay and are generally known. They have a floor running unit running on tracks, which can be brought with a tank end plate sealingly against an open end face of the vacuum tank. On the side of the plate defining the vacuum tank are disposed a winder, an unwinder and, above an evaporator bank disposed stationarily in the vacuum tank, a coating cylinder for a film, a coating window, and additional components. To remove a coated roll of film from the apparatus and bring in a roll of the film that is to be coated, the floor running unit backs out of the vacuum tank with the components borne on its tank plate, so that the winder and unwinder become accessible.
 
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